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声表面波气体传感器的理论分析
Theoretical Analysis of SAW Gas Sensor
【摘要】 声表面被气体传感器的敏感物质是在声表面波传播途径上覆盖一层具有选择性的吸附薄膜,这些薄膜在吸附对其敏感的气体物质后,质量密度,弹性参数。介电常数,导电率都将发生变化,通过理论分析,导出了该传感器的测量方程.
【Abstract】 The sensitive material of this sensor is selective sorption thin-film coating along the acoustic beam path. The mass density, elastic constant, dielectricconstant, electric conductivity of these films will change after abeorbing their sensitive gases. Through the theoretical analysis, the test equations have been derived.
- 【文献出处】 传感器技术 ,JOURNAL OF TRANSDUCER TECHNOLOGY , 编辑部邮箱 ,1997年03期
- 【分类号】TP212
- 【被引频次】35
- 【下载频次】300