节点文献
智能介质膜厚度测试仪的研制
A Smart Tester of Dielectric Film Thickness
【摘要】 本文研制的智能测试仪能直接读出金属表面所镀介质膜的厚度,文中介绍了测量原理和仪器结构
【Abstract】 This paper introduces a smart tester which can display the thickness of dielectric film coated on metal surface. The operation principle and structure of the instrument are described in this paper.
- 【文献出处】 半导体杂志 , 编辑部邮箱 ,1997年02期
- 【分类号】O484.5
- 【下载频次】26