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光栅耦合量子阱红外探测器一维光栅的光谱响应

Spectral Response of Stripe Gratings for Quantum Well Infrared Photodetectors

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【作者】 潘栋; 曾一平; 李晋闽; 孔梅影;

【Author】 Pan Dong; Zeng Yiping; Li Jinmin and Kong Meiying (Center of Material Science-New Material Division,Institute of Semiconductors, The Chinese Academy of Science. Beijing 100083)Received 14 May 1996, revised manuscript received 26 September 1996

【机构】 中国科学院半导体研究所材料中心新材料部!北京100083;

【摘要】 通过包括所有可能的高阶衍射波,本文计算了量子阱红外探测器一维光栅的光谱响应,发现一维光栅有很宽的光谱范围,可以同时覆盖3~5μm和8~14μm两个波段,这将有益于红外焦平面列阵和双色探测器的设计.同时,文中就光栅深度和沟道宽度对光栅光谱响应的影响作了研究,发现光栅的深度对其光谱响应和耦合效率有明显的影响,存在一个对应最大耦合效率的光栅深度。

【Abstract】 By including all possible high order diffracted waves, we have calculated the spectral response of stripe gratings for quantum well infrared photodetectors (QWIPs) and found that stripe gratings can cover very wide spectral response. In particular, 3~5μm and 8~14μm spectral ranges can be covered simultaneously, which is very helpful to design two-color and wide band response QWIPs. In addition, the effects of grating depth and channel width on the spectral response have been investiged. It is found that the grating depth has an obvious influence on the spectral response and coupling efficiency of gratings and there exists an optimum grating depth corresponding to the maximum coupling efficiency.

  • 【文献出处】 半导体学报 ,CHINESE JOURNAL OF SEMICONDUCTORS , 编辑部邮箱 ,1997年06期
  • 【分类号】TN21
  • 【被引频次】2
  • 【下载频次】87
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