【摘要】 本文首次采用了Rayleigh－Ritz方法来分析微机械中经常采用的多层膜结构（混合结构）定子的固有振动特性．研究了平面内应力（in－planestress）和弯曲应力（flexuralstress）对固有频率的影响．模拟计算和实验结果符合得较好．此外还讨论了定于有关参数对固有频率的影响．更多还原

【Abstract】 By using Raylrtigh-Ritz method, the intrinsic(natural) frequencies of the hybrid structure stator are theoretically calculated in this paper for the first time. The in-plane stress and flexural stress are considered reasonably. The calculated data are in agreement with the experimental results. In addition, the influence of some parameters on intrinsic frequency is also discussed.更多还原