【摘要】 介绍气体微流量标准装置用比较测量法和直接测量法校准漏孔的方法，并给出漏孔的核准结果。该标准装置的校准范围为１７～１×１０－５Ｐａ·Ｌ／ｓ，不确定度小于２％。更多还原

【Abstract】 In this paper,two leak calibration methods, the measurement method and the directmethod. are described.The results of leak calibration are given. By gas flow standard apparatus, thereference leak in 17￣1 × 10-5 Pa·L/s range can be calibrated with uncertainty less than 2%.更多还原