节点文献
铜的表面改性热处理新方法初探
The basic study of a new heat-treatment method for surface property improvement of copper
【摘要】 本文介绍了含硅气氛下纯铜低温CAD表面改性的高频感应加热设备,CVD装置以及相应的测温装置和手段.进行了纯铜CVD表面改性的初步研究.结果表明,在600℃左右的温度下.利用硅烷-氢(SiH4/H2)混合气在纯铜试样表面的热分解,能够获得铜-硅化合物表层,其硬度较基体有很大的提高.当形成铜硅固溶体时,硬度无明显变化.
【Abstract】 A new heat--treatment method for surface property improvement of copper is introduced in this paper. The high frequency induction heating device, and the corresponding device of temperatire measarement are also discribed. The basic study indictates that a coppersilicade intermetallic compound coatintg forms if SiH4 /H2 mixture is used and appropriate technology is selected. It is found that the hardness of the coating is highly improved.
【关键词】 表面改性;
CVD;
铜-硅化合物;
【Key words】 surface property improvement; CVD; Cu--Si intermetallic compound;
【Key words】 surface property improvement; CVD; Cu--Si intermetallic compound;
【基金】 国家自然科学基金
- 【文献出处】 浙江大学学报(自然科学版) ,Journal of Zhejiang University(Natural Science) , 编辑部邮箱 ,1996年05期
- 【分类号】TG166.2
- 【被引频次】5
- 【下载频次】111