【摘要】 掺银ＳｎＯ_ｘ薄膜的催化作用张勇，周坤粦，曹伟民（中国科学院成都有机化学研究所成都６１００４１）关键词气敏薄膜，表面掺杂，催化ＳｎＯ２是重要的气敏传感材料，采用纳米技术，可使元件微型化、集成化，并可提高灵敏度。本文以等离子体增强化学气相沉积法制得超微?..更多还原

【Abstract】 By doping Ag on the surface of the SnO_x gas sensing film, the sensitivity and selectivity are improved greatly, and the working temperature is decreased. The catalysis of Ag has been discussed based on the color change of the film during measuring procedure.更多还原