【摘要】 分析人字形光栅副莫尔条纹的特点，研究了一种用莫尔偏折术检校光束准直性的改进方法，利用双场莫尔条纹方向平行性进行判定，此法使用方便且精度可提高一倍以上。更多还原

【Abstract】 An improved method of checking the light beam collimation with Moire deflection technique is researched by analyzing the features of Moire Frinse of herringbone grating pair. The collimation of light beam is determined according to tile direction parallelism of double-field Moire fringe. Tile alignment accuracy can be increased by a factor of 2.更多还原