【摘要】 提出用泰曼干涉仪检测衍射受限的显微物镜，将实验中拍摄到的干涉图形数字化后，经计算机处理，用Ｚｅｎｉｋｅ多项式拟合干涉图，可获得各采样点波像差、峰谷误差及均方根误差和各种几何像差．更多还原

【Abstract】 Twyman-Green interferometer is used for the testing of diffraction-limited microscopicobjective. After the interferograms pickuped in the experiment are digialized, they are processed bya computer and fit with Zernike polynomial the wave aberration, peak-valley err6r, root-mean-squareerror and various geometric aberrations can be obtained for various sampling points.更多还原