【摘要】 由于其原子量级的分辨力和固有的测量原理，ＳＰＭ很适合于精密尺寸和形貌的测量。但是，一般的ＳＰＭ并不是专为精密测量而设计的，其结构上存在着许多误差因素，较大地影响了测量结果。本文从测量角度出发，分析了各误差因素在测量结果中的表现形式，并给出了相应的提高测量精度的方法。实验结果证明了这些方法很好地提高了ＳＰＭ尺寸测量的精度。更多还原

【Abstract】 Because of its high resolution and inherent measuring mechanism,SPM is very suitable for precision dimensional measurement and micro-pattern measurement. However,SPM isn’t usually designed for precision dimensional measurement specifically. Thus,there are a lot of inherent error sources in SPM. Only when the error sources are carefully removed or greatly decreased,the measurement data become true and reliable. So, every error source is carefully analyzed from the aspect of measurement. We also study the effects of these errors to the images taken by SPM. It is shown that the performance of SPM in precision demensional metrology will be strongyly dependent on foUr aspescts,namely piezoelectrio errors .mechanism errors of scanner.the arrangement of measurement & control system and the relative relationship between sharp tips and samples. Several methods are respectively proposed to minimize the unesirable errors cause by the above four aspects. Our methods are verified to be very valid in enhancing the measuring accuracy of SPM.更多还原