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激光自动聚焦三维形状测量系统的研究
Research of an Automatic Surface Profile Measuring System Using a New Laser Auto-Focusing Method
【摘要】 基于激光自动聚焦测量方法提出一种实现快速、精密三维形状测量的扫描速度控制算法。介绍了系统的构成及激光测量头的原理。自动地对曲面轮廓进行连续扫描测量不仅提高了测量效率,还解决了对软质材料测量的难题
【Abstract】 A precise and rather fast surface profile measuring system was developed utilising a new laser auto-focusing speed control algorithm,which is divided into two speed-levels. The measuring system is composed of a noncontact probe and a high-performance servomechanism. Being measured the profile curvature continuously and automatically not only realizes high-speed measurement,but solves a difficult problem about the profile measurement of soft materials also.
- 【文献出处】 仪器仪表学报 ,CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT , 编辑部邮箱 ,1996年02期
- 【分类号】TH720.3
- 【被引频次】33
- 【下载频次】200