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以Li₂B₄O₇为基片150MHzSAWF的设计与研制

Design and Fabrication of 150 MHz SAWF on Li₂B₄O₇ Crystal Substrate

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【Author】 Zhou Yadong; He Xianli;Zhou Yi;Ma Chujian; Zhang Lu; Zhang Jie(Beijing Polytechnic University,Beijing,100022)

【摘要】介绍了以Ｌｉ２Ｂ４Ｏ７为基片，１５０ＭＨｚ声表面波窄带滤波器的设计与制作。在设计中采用了波导耦合谐振器的结构形式，按新研究的光刻腐蚀方法［１］，成功地制作出了１５０ＭＨｚ的窄带滤波器。验证了波导耦合谐振滤波的理论．证实了Ｌｉ２Ｂ４Ｏ７确实是较好的声表面波基片材料。更多还原

【Abstract】 in this paper the design and fabrication of 150 MHz SAWF on Li2B4O7 crystal substrate are introduced.The structure of waveguide-coupled resonator filter is adopted in the design.A narrow bandpass 150 MHz SAW filter has been fabricated on Li2B4O7 crystal substrate by a newmethod of photoeching.The measured results of the filter verified that the Li2B4O7 crystal is trulya good SAW substrate material.更多还原