【摘要】 使用硝酸锆作锆源的溶胶－凝胶方法制备ＰＺＴ铁电薄膜。他们的电学性能被测试包括电滞回线，电流Ｉ（ｔ）特性，漏电流，矫顽场疲劳和老化。测到的ＰＺＴ薄膜剩余极化８．２μＣ／ｃｍ^２，矫顽场６８ｋＶ／ｃｍ．簿膜的寿命可超过１０^１１周期。更多还原

【Abstract】 Lead zirconium titanate(PZT) ferroelectric thin films have been prepared by solgel processing using zirconium nitrate as the zirconium source. The electrical properties were measured. These parameters include the hysteresis loop,coercive field,I(t) character, leakage current,fatigue and aging.The remanent polarization of PZT thin films was 8. 2 μC/cm2,the coercive fieldwas 68 kV/cm,and the lifetime of the films might exceed 1011cycles.更多还原