【摘要】 使用配备有ＥＤＳ和ＥＣＰ附件的ＳＥＭ、ＡＥＭ和ＳＴＭ研究了在７５０和８００℃的Ｚｒ（Ｙ）Ｏ２衬底上磁控溅射沉积的大面积ＹＢＣＯ超导薄膜的表面组织状态。ＹＢＣＯ薄膜为ｃ轴取向单晶，但衬底温度为８００℃时，膜表面的突出组织多为ＣｕＯ颗粒，小坑较多，表面粗糙；衬底温度为７５０℃时，突出组织多为棒状和多边形１２３结构，很少小坑，表面较平整。对不同衬底温度下膜的生长机制和小坑的形成机制进行了讨论。更多还原

【Abstract】 Large area YBCO superconducting thin films were grown on the Zr(Y)O2 substrate at 750 and 800℃ respectively by magnetron sputtering, and the surface morphology was studied with AEM,STM and SEM with an EDS and ECP attachments. The YBCO thin film was found to be a c-axis orientated single crystal. At 800℃ the surface out-growths of the thin film were mainly CuO particles and many small holes were found to exist on the surface, which resulted in rougher surface; whereas, at 750℃, the out-growths were mainly the 123 structure in the form of a rod-like and polygon and the surface was much smoother because of less small holes on the surface. The mechanism of the thin film growth and the formation of the small holes on the surface grown at the two temperatures were discussed.更多还原