【摘要】 本文推荐一种镀液，用于制作电磁型微电机转子坡莫合金导磁层，研究了该镀液的组成和工作条件对镀层成份和内应力的影响，表明该镀液具有可供选用的电流密度范围宽，允许较高Ｆｅ２－浓度和镀层内应力低等优点。更多还原

【Abstract】 In this paper, a solution suitable for mask plating to manufacture the permalloy layer was developed. The layer was used as the soft magnetic.underlayer for rotor of magnetoelectrical micromotor, The influence of the solution components and operation conditions on composition and internal stress of theplating layer was also investigated. It is shown that this solution has advantages, such as wide applicable range of current denaity, high Fe2+ concentration, and low internal stress of plating layer.更多还原