【摘要】 本文从实验和理论上对用粉末溅射研制的ＳｎＯ２／ＣｅＯ２酒敏薄膜的性能与膜厚、温度、掺杂量等进行了研究，并根据研究的结果和有关理论对平面薄膜型酒敏传感器的工艺和结构进行了设计；介绍了所研制的器件的一些性能．更多还原

【Abstract】 The properties of powder sputtered SnO2/CeO2 gas sensing thin filmsfor alcohol are investigated in experimemt and theory, which are related to film thickness,temperature and dose et al. For these results above,the technology and structure of planethin film gas sensors for alcohol were designed, and some properties of these sensors areintroduced.更多还原