【摘要】 提出一种新型压阻式超高压传感器。用金属膜片、硅油和低量程压阻敏感元件构成传感器，从而实现了利用便宜而常见的较低量程的硅压阻敏感元件构成大量程的高压传感器。给出该传感器工作原理的理论分析和主要结构参数的估算方法。按该文的原理，用２０ＭＰａ的压阻敏感元件制成了５００ＭＰａ的高压传感器的原型，其固有频率高达２４６ｋＨＺ，超过了目前同量程的其他传感器，且介绍了原型样机的标定结果，证明其原理的可行性。最后提出对这种传感器进一步开发的建议。更多还原

【Abstract】 In this paper, the principles and construction of a new-type piezoresistive high pressure transducer is presented. Transducers of this kind consist of metal membrance,silicon oil and piezoresistive pressure sensing-element and can be used to measure the high pressure beyond the range of sensing-element. The new concept,theoretical analysis and design method of transducer is also presented. A prototype transducer with range of 500 MPa using piezoresistive element with range of 20 MPa has been successfully developed and it’s resonant frequency is about 246 kHz, exceeding other types of transducers with similar range. The result of calibration shows that the principle of this new-type transducer is feasible. Suggestions for further development is given.更多还原