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Phase evolution of silicide in Nb/Si multilayers

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【Author】 ZHANG Ming, YU Wen, ZHANG JunZHANG Yuanyi and WANG Wenkui(Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China)

【机构】 Institute of Physics； Chinese Academy of Sciences； Beijing 100080； China； Also in International Center for Materials Physics.Chinese Academy of Scienoes Shenyang 110015 China；

【摘要】 <正> With the application of silicide in electronic components and basic research areas, its formation has been a continual concern. Recently, extensive researches into phase evolution have been made in metal/Si systems during annealing at low temperature, but the effects of kinetic and thermodynamic factors on phase selection and phase formation during更多还原

【关键词】 Nb/Si multilayers； silicide； phase evolution.；
【Key words】 Nb/Si multilayers； silicide； phase evolution.；

【基金】 Project supported by the National Natural Science Foundation of China.

【文献出处】 Chinese Science Bulletin ,科学通报(英文版) , 编辑部邮箱 ,1996年15期

【分类号】O472
【下载频次】10

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