【摘要】 报道了用氢化非晶硅（α－Ｓｉ：Ｈ）ｐｉｎ二极管作光敏层，扭曲向列型液晶（ＴＮＬＣ）作电光调制层的光寻址空间光调制器（ＯＡＳＬＭ）的设计、制作与性能测试．结果表明制得的（ＯＡＳＬＭ）分辨率大于２０ｌｐ／ｍｍ；在３００ｌｕｘ白光写入时对比度高于２５：１；白光写入灵敏度约３ｌｕｘ。更多还原

【Abstract】 We report the fabrication and operation of an optically addressed spatial light modulator(OASLM), consisting of a hydrogenated amorphous silicon (α-Si: H) pin photodiode as a photosensor and a twist nematic liquid crystal(TNLC) as the modulating material. The intrinsic and doped α-Si: H films are deposited continuously by PECVD method in a reaction chamber with a shutter. The optical measurement indicates that the OASLM has a resolution of at least 20 lp/mm. The contrast ratio under the 300 lux illumination of white light is higher than 25: 1. The white light writing sensitivity is about 3 lux.更多还原