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溶胶凝胶法制备二维气敏光学薄膜及其氨气敏光学性能研究
Using sol-gel method to manufacture two-dimension gassensing optical film and studying the film in ammonia vapor
【摘要】 本文研究了用溶胶凝胶法制作二维SnO2:TiO2混合薄膜(厚度小于1μm),并测量了它在氨气氛中的气敏透射谱,发现对低浓度很灵敏,且最佳灵敏区显示出对二维薄膜厚度的依从性。利用这些现象可制成对低浓度敏感且有气体选择性的气敏传感器件。
【Abstract】 In this paper,we study sol-gel method to manufacture two-dimension SnO2:TiO2 compound film(thethickness of film are less than 1μm),and study the gas-sensing transmittivity spectrum in ammonia vapor,observethat the gas-sensing film response well in lower concentration,and the gas-sensing wavelength,in which the transmittivity increases,depends on the thickness of the two-dimension film. It is possible to use these phenomena tomake the gas-sensing film for lower concentration,hving the charactor of gas choice.
【关键词】 气敏效应;
溶胶凝胶法;
二维气敏光学薄膜;
【Key words】 gas sensing effect; sol-gel method; 2D-gas sensing optical film;
【Key words】 gas sensing effect; sol-gel method; 2D-gas sensing optical film;
【基金】 广东省自然科学基金
- 【文献出处】 激光杂志 ,LASER JOURNAL , 编辑部邮箱 ,1996年01期
- 【分类号】TN379.04
- 【被引频次】1
- 【下载频次】64