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Theoretical model of glow discharge plasma

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【Author】 GUO Xiaoming ZHOU Tingdong and PAI Siuting(Department of Electrical Engineering, Tsinghua University, Beijing 100084, China)

【机构】 Department of Electrical Engineering； Tsinghua University； Beijing 100084； China； China；

【摘要】 <正> The physical model for glow discharge plasma has been modified. The modified model is also analytic and self-consistent. Electron density distribution under the conditions of longer gap separations and different working gas pressures has been analyzed, and comparison between theory and experiment has been made. The modified model has wider applications, and the theoretical results are in better agreement with the experimental.更多还原

【Abstract】 The physical model for glow discharge plasma has been modified. The modified model is also analytic and self-consistent. Electron density distribution under the conditions of longer gap separations and different working gas pressures has been analyzed, and comparison between theory and experiment has been made. The modified model has wider applications, and the theoretical results are in better agreement with the experimental.更多还原

【关键词】 glow discharge； analytic forms； low temperature plasma.；
【Key words】 glow discharge； analytic forms； low temperature plasma.；

【基金】 the National Natural Science Foundation of China.

【文献出处】 Science in China,Ser.A ,中国科学A辑(英文版) , 编辑部邮箱 ,1996年04期

【分类号】O531
【下载频次】23

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