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脉冲Nd:YAG激光烧蚀金属Al产生等离子体的时空分辨光谱研究
Time-and Spatial-Resolved Studies of Plasma Emission Produced by Pulsed Nd: YAG Laser Ablation of Metal Al
【摘要】 本文采用时间与空间分辨的光谱测量技术,测量记录了在Ar为缓冲气体下,用Nd:YAG脉冲激光烧蚀金属Al,产生的等离子体发射光谱随时间和空间的强度分布,研究了烧蚀环境气压对其的影响.并对发光粒子的激发机理进行了探讨,结果分析表明激光洪蚀金属Al产生等离子体中,原子和离子的激发主要通过电子的碰撞传能而产生,而连续辐射则来自烧蚀靶则来自烧蚀靶出射电子的运动产生的韧致辐射.
【Abstract】 Time-and Spatial-resolved measurements of plasma emission spectra produced by pulsed Nd: YAG laser ablation of metal Al in Ar atmosphere are reported. The effect of pressure over the range 13Pa to 80kPa on the emission intensity and the detailed mechanism of species excitation are studied. The results indicate that the most possible mechanism of atom and ion excitation in plasma is electron collision energy transfer and the continuum background emission comes from the Bremsstrublung e-mission of electrons ejected from the target.
【Key words】 Nd YAG laser Laser ablation emission spectra metal Al;
- 【文献出处】 化学物理学报 ,Chinese Journal of Chemical Physics , 编辑部邮箱 ,1996年02期
- 【分类号】O657.3
- 【被引频次】4
- 【下载频次】138