【摘要】 本文在小瓷管上用MOCVD技术沉积SnO₂气敏薄膜,研究了Pd、Th掺杂对该SnO₂元件气敏性能的影响。掺杂Pd使元件对乙醇、汽油的灵敏度均增大,而掺杂Th则仅提高了对乙醇的灵敏度,对汽油的灵敏度反有所降低。因此有希望开发为不受汽油干扰的乙醇敏感元件。更多还原

【Abstract】 SnO2 thin film was deposited on the surface of a ceramic cylindrical insulating tube by using MOCVD technique. The effects of Pd and Th on the gas sensitivity of SnO2 thin film have been invesigated. Doping of Pd increased the sensitivity both of ethanol and petrol. Different effect was observed for the doping of Th. Addition of Th increased the sensitivety of ethanol only but decreased the sensitivity of petrol. It also provides the- possibility for the fabrication of ethanol gas sensor without petrol interference by using the doping of Th.更多还原