节点文献
高性能的类金刚石红外光学薄膜
High Quality IR Material-Diamond-like Carbon Film
【摘要】 综述了类金刚石红外光学薄膜在红外光学领域的应用,表明该薄膜不仅是一种高性能的红外光学材料,而且是各种红外镀膜元件的高性能保护膜。文中还提出了在类金刚石薄膜进一步开发、研究及应用中仍需解决的一些工艺及技术问题,描述了制备大尺寸均匀性类金刚石薄膜的可行性方案。
【Abstract】 Rescarches show that the diamond-like carbon film (DLC) can not only be used as a IR material but also be used as a protecting coating. The method for the drposition of large area and homogeneous DLC films is described. Problems faced with in the further development and application of the films are also discussed.
【关键词】 类金刚石薄膜;
红外多层抗反射膜;
射频等离子化学气相沉积;
【Key words】 Diamond-like; Carbon Film; IR multi-layer anti-reflection film; RF-PCVD;
【Key words】 Diamond-like; Carbon Film; IR multi-layer anti-reflection film; RF-PCVD;
- 【文献出处】 红外技术 ,INFRARED TECHNOLOGY , 编辑部邮箱 ,1996年04期
- 【分类号】TN213
- 【被引频次】19
- 【下载频次】224