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傅里叶变换条纹相位分析法测量非球面镜
ASPHERICAL MIRROR TESTING USING FOURIER TRANSFORM EVALUATION OF FRINGE PHASE
【摘要】 本文将傅里叶变换(FFT)条纹位相测量方法用于非球面镜的检测.叙述了波面位相偏差测量原理.提出用最小二乘拟合波象差代替计算全息图(CGH)补偿非球面波象差,并分析了测量误差.
【Abstract】 In this paper,Fourier transform evaluation of fringe phase is proposed for measuringaspherical mirror.The testing principle of phase deviation is described.The wave aberration estimationof aspheric surfaces by least-square principle instead of computer-generated holograms(CGH)compensation is also presented,and some errors of algorithm are discussed.
【关键词】 傅里叶变换;
条纹相位;
非球面镜测量;
【Key words】 Fourier transform; Fringe hase evaluation; Aspherical mirror testing;
【Key words】 Fourier transform; Fringe hase evaluation; Aspherical mirror testing;
- 【文献出处】 光子学报 ,ACTA PHOTONICA SINECA , 编辑部邮箱 ,1996年05期
- 【分类号】O438
- 【被引频次】3
- 【下载频次】162