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表面波型微波感耦常压氖等离子体的激发温度研究
THE STUDY OF EXCITATION TEMPERATURE OF Ne-MIP SUSTAINED BY A SURFATRON IN ATMOSPHERIC PRESSURE
【摘要】 用光学多道分析仪研究表面波型常压微波感耦氖等离子体(Ne-MIP)。采用“多线法”测定了Ne-MIP的激发温度;研究了实验参数对激发温度的影响;讨论了该等离子体的激发生成机制;推算了亚稳态原子浓度随实验参数的变化情况。
【Abstract】 In this paper,the Neon Microwave-induced Plasma (Ne-MIP)Sustained by a surfatron has been studied with Maxwell’s method using an OMA equipment.The Ne-MIP was obtained in atmosphere pressure; the influence of experimental parameters on Excitation Temperature,such as, microwave power, flux of Neon gas and view possition has been considered;the excitation mechanism of this kind of plasma has been discussed; according to this mechanism, the atomic conentraion of Neon metastable under different experimental conditions has been calculated.
【关键词】 Ne-MIP;
激发温度;
激发机制;
氖亚稳态;
【Key words】 Ne-MIP; Excitation temperature; Excitation mechanism; Ne metastable.;
【Key words】 Ne-MIP; Excitation temperature; Excitation mechanism; Ne metastable.;
- 【文献出处】 光谱学与光谱分析 ,SPECTROSCOPY AND SPECTRAL ANALYSIS , 编辑部邮箱 ,1996年06期
- 【分类号】O531
- 【被引频次】2
- 【下载频次】44