【摘要】 本文设计和研制了一种新结构薄型压电行波小马达。小马达由圆形压电薄片或圆环形压电薄片和兼作公共电极的金属弹性体联成一体作马达的定子，薄型转子坐落在公共电极金属弹性体上，从而使压电马达的构造简单，也简化了制作工艺。研制成的薄型压电行波小马达直径φ８ｍｍ，定子总厚度≤３５０μｍ，在１０－１２伏交变电讯号激励下，转子转速≥１００ｒｐｍ。更多还原

【Abstract】 Anew type of piezoelectric traveling wave micromotors has been designed and fabricated. The small motor is composed by the stator which is the combination of annular/circular membrane and metal elastic base using as the common electrode at the same time and the rotor which is placed on the metal elastic body.Thus,the motor structure is simple and easy to fabricate.A piezoelectric traveling wave micromotor has been fabricated with the stator diameter 8mm.The total thickness of the stator is 350μm.Under the alternative excitation voltage 10-12V,the revolving speed of the rotor is more than 1 00rpm.更多还原