【摘要】 本文报道了利用Ｓｉ单晶各向异性的特点，在两块Ｓｉ单晶片上，择优蚀刻出排列形状不同的Ｖ形Ｓｉ槽，通过嵌入Ｖ形槽中的光纤，将间距为６０μｍ的１０个光信号耦合到探测器的间距为１０００μｍ的１０个接收面上。更多还原

【Abstract】 This paper reports that B shape of Si groove which ranks in different shape has been selectively etched on the two chips of single crystal of Si by taking advantatge of different character of single crystal in different direction.Through enbeding fiber into V shape of Si groove.10 signals between the distance of 600 μm were coupled onto the plane of 10receivers between distance of 1000 μm.更多还原