【摘要】 介绍了等离子体增强磁控溅射离子镀（ＰＥＭＳＩＰ）ＴｉＮ涂层的工艺、组织结构和性能．研究了氮分压和靶功率对涂层相组成和性能的影响，讨论了Ｔｉ２Ｎ对涂层硬度的影响．实验结果表明，由Ｔｉ２Ｎ和Ｔｉｎ两相组成的涂层硬度高，显著提高刀具耐用度．更多还原

【Abstract】 This article deals with technologies, microstructures and properties of the coatings deposited by PEMSIP. The influence of N2 partial pressure and the target power on the component phases and the properties of the coatings is studied. The effect of Ti2N on the microhardness of the coatings is discussed. The results show that the,microhardness of the coatings consisting of Ti2N and TiN is harder than that of TiN only and that the coatings consisting of Ti2N and TiN make the tool life increase markedly.更多还原