【摘要】 本文对光刻腐蚀法、光刻镀(涂)层法、镀层腐蚀法、双镀层法等多种高温栅制作工艺进行了详细的讨论,对它们的适用范围及所制光栅的质量控制因素进行了分析,首次提出了多介质镀层法制作高温光栅的新工艺,并成功地制作出可耐1000℃的多介质镀层高温栅,高温氧化实验结果表明,多介质高温栅具有较好的抗氧化能力。更多还原

【Abstract】 In this paper, the etching photoetching method, the deposited film photoetching method, the etching deposited film method and the two deposited layers photoetching method were studied, their applicable range and control factors of producing grating were analysed- The multi-media deposited layer method was put forward. The multimedia deposited layer grating for high temperature was successfully used in the measurement at 1000℃ and the good experimetal results verified it had a strong oxidation resistant ability.更多还原