【摘要】 本文介绍了离子束辅助沉积技术的基本原理，主要工作特点，设备及主要影响因素。综述了利用该技术在制备各种新型膜层方面研究的新进展。并指出该技术的不足及未来发展方向。更多还原

【Abstract】 The principle、main advantages and various techniques of Ion Beam Assisted Deposition are introduced. The recent progress of this new technique in preparing new coatings are reviewed. The disadvantages and future trends of this technique are also pointed out.更多还原