【摘要】 较系统地研究了静电梳驱动微振子的结构和工作原理,导出了微振子的谐振频率、品质因子及跨导等参数,以及相应的力学和电学模型,并研究了空气粘滞效应对品质因子的影响.在此基础上,设计出几种不同尺寸、不同形状的微型谐振子结构,并用表面微机械加工方法成功地制成了能横向振动的静电梳微振子.实测得到的谐振频率在7.5～9.0kHz范围内,在空气中品质因子为100左右,与理论计算能较好符合.更多还原

【Abstract】 This paper has systematically siudied structure and principle of the electro-static driven comb microresonantors, derived its resonant frequency, figure of merit,transconductance and mechanical model and electrical model. The effect of air viscosityon the figure of merit was also studied. On the basis of this theoretical analysis,we de-signed several types of clectrostatic driven microresonators with different size or shape,and suceesed in fabricating some types of microresonators,which could vibrate laterallyin the plane parallel to the substrate. By measuring the resonant frequency,it is in therange of 7.5-9.0 kHz. The figure of merit is about 100 in the air,the calculated andmeasured resonant frequencies are in close agreement.更多还原