【摘要】 Ｎ注入ＧａＰ中深度分布已被ＳＩＭＳ和１４Ｎ（Ｄ，α）１２Ｃ核反应测出。可用拟合程序拟合出在不同注入条件下Ｎ的分布多数，其分布参数是用皮尔逊ＩＶ型分布曲线拟合的。拟合出的参数同ＴＲＩＭ８９程序和邵其　等人的计算结果作了比较，拟合结果与计算结果是一致的。更多还原

【Abstract】 The depth profile of implanted nitrogen in GaP was measured by SIMS and 14N(D,α) 12C nuclear reaction. Its distribution paramters can be fitted on different condition of implanting by a fitting parameters are determined by curve fitting of Pearson IV distribution. The fitting parameters are compared with the parameters calculated by the program of TRIM89 and Shao Qiyun and others. The calculated results are in good agreement with the fitting.更多还原