【摘要】 采用了外加热式直流等离子体化学气相沉积及渗金属工艺并在放电工件上直接测温的方法，克服了高于轰击加热引起的温度不均匀等因素并且膜的结构及力学性能得以改善。更多还原

【Abstract】 By the use of hot wall furnace D. C plasma vapour deposition method, the workpiece temperature was driect measured. It Fas a advantage with different geometries of workpieces and for different workload the temperature be controlled. The structure of deposited film was studied.更多还原