【摘要】 采用ＹＢＣＯ烧结靶平面磁控溅射，原位处理工艺，在多晶银基片上进行镀制高温超导薄膜的研究。经过大量实验，研究了沉积温度、真空度、氩氧比对膜层结构、性能的影响。并在温度为７００℃、真空度为１８Ｐａ、氩氧比为１：１，靶电流为１～２Ａ的条件下，获得了具有ｃ轴织构的ＹＢＣＯ超导薄膜。更多还原

【Abstract】 In This paper,the plating of high temperature superconductive thin films is studied. The superconductive thin films are plated through magnetron sputtering with a plane YBCO Sintering target and treated in-situ annealed on polycrystalline silver substrates.The effects of deposit temperature, vacuum degree and the ratio of argon to oxygen on stracture and property of films are stulied. The textured thin films of YBCO superconductor are obtained under the following condition:substrate temperature 700℃,vacuum 18Pa,the ratio of Ar to O2 is 1:1.更多还原