【摘要】 本文综述了集成气体传感器的发展过程和工作机理,讨论了Schottky气敏二极管、MOS气敏二极管、MOS气敏场效应管、厚膜(或薄膜)集成气体传感器和集成气体传感器阵列。更多还原

【Abstract】 A brief review is given on the development processes and working mechanism for integrated gas sensor. The summary and discussion on sehottky gas diode, Mos gas field effect transistor, thick films (or thin films) integrated gas sensor, integrated gas sensor array are reported in this paper.更多还原