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YBaCuO超导靶材制备工艺的研究

STUDY ON SINTERING PROCESS FOR YBACUO SUPERCONDUCTING TERGET

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【作者】 李佳;

【Author】 Li Jia(Basic Courses Department)

【机构】 安徽工学院基础部 合肥230069;

【摘要】 根据超导相YBa2Cu3O7-Y的晶体结构与含氧量、温度的关系,正确制订了YBaCuO超导靶材的烧结工艺——预烧温度、烧结温度及冷却速率,从而为用直流磁控溅射法研制高Tc、大临界电流密度Jc的超导簿膜提供了前提.

【Abstract】 According to the relationship between the crystal structure of superconducting phase YBa2Cu3O7-y and the temperature, and its Oxygen content, a suitable sintering process (presintering temperature, sintering temperature, and cooling rate) for preparing YBaCuO superconducting target has been successfully formulated. And then, high - Tc and critical current density (Jc) have been obtained by using DC magnetron sputtering method.

【关键词】 超导薄膜; 磁控溅射;
【Key words】 superconducting thin film; magnetron sputtering.;
  • 【分类号】TM26;
  • 【下载频次】104
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