【摘要】 采用不同工艺，在Ｆｅ基上气相沉积ＴＩＮｘ薄膜。通过扫描电镜，划痕仪，俄歇电子能谱，粘着力测量仪的观测，分析和计算，给出了膜的形貌，组份，光学特性和力学特性。发现随着ＴＩＮｘ膜中组分及其氧含量的变化，膜的颜色，粘着力，ＴＩＮｘ膜的均匀性都发生显著的变化。本文还采用一种与文献不同的方法，较为简便地处理了俄歇谱中Ｔｉ和Ｎ峰的重造现象。更多还原

【Abstract】 Abstract Using different process, we have fabricated the TiNx thin films on Fe by Vapor Depositionmethod. The TiN. films have been done the observation, analysis and computation employing delimitation mark device, SEM, AES and device of adhesion measuring. We have obtained the morphology photographs, composition, optical and mechanical characteristics of TiN. films and discovered that the TiN. film’s colour,adhesion and uniformity change notably with composition and oxygen element content in the TiN. films.In this’ paper, we have handily dealed with overlaping phenomenon between Ti and N peakson Auger electron spectra by using a different method from the documents.更多还原