节点文献
大面积ACPDP保护膜的制备及其特性之研究
Study of the Manufacturing Technology and its Characterization for Large Area ACPDP Protection Film
【摘要】 本文讨论了制取均匀、致密、清洁MgO保护膜的途径及不同工艺对膜和ACPDP特性之影响。
【Abstract】 The technology manufacturing the uniform, compact and clean protection MgO film and the effects of influencing the film and ACPDP characteristics are discussed in this paper.
- 【文献出处】 真空电子技术 ,VACUUM ELECTRONICS , 编辑部邮箱 ,1995年03期
- 【分类号】TN141.5
- 【被引频次】2
- 【下载频次】51