【摘要】 通过显微镜放大、ＣＣＤ图像接收采集、计算机数据处理技术来测量自聚焦透镜（ＧＲＩＮ透镜）光斑直径、分辨率。重点对误差进行分析。通过对样品５２０－０２５－０８３的测试，表明该系统光斑直径、分辨率测试不确定度优于±０．１μｍ及１％，与误差分析相吻合。更多还原

【Abstract】 The measurement of GRIN lens focused spot diameter and resolution is made. The measuring error is analyzed. It is shown that system measuring uncertainty is better than ± 0. 1μm and ± 1 % by measuring the Sample 520--025--083. The result is good agreement with the error analysis.更多还原