【摘要】 本文以硅微机械技术为基础研究了微谐振器和集成光学传感器。讨论了不同激励与检测方式下的谐振器的理论、工艺及其性能。并研究了以硅脊形波导为基础制作集成光学传感器的理论与工艺问题。更多还原

【Abstract】 Abstract This paper studied micro-resonators and OEIC sensors which are basedon micromechanicaI technology.It also discusses the theory,technology and properties ofthe resonators with different exciting and sensing methods,Last,it studies the theory andtechnology of OEIC sensors that is based on the silicon guide.更多还原