【摘要】 作为微机械的动力源，超声微电机具有诸多优良性能，一直是微机械研究的热点技术之一。首先，本文类比了几种微机械意义上的微电机，指出了超声微电机的独特优点，提出了研究超声微电机的重大意义。接着，作者运用粗糙度理论，对广义瑞利波理论进行修正，得出超声微电机较精确的转速数学模型。最后，作者指出超声微电机进一步实用化后的广阔应用前景。更多还原

【Abstract】 Abstract As the power resources in MEMS(Micro Electro MechanicalSystems),ultrasonic micromotor has been one of kernel technologies in MEMS since it has a lot of fineperformance.First,this paper contrasts several kinds of micromotors with each other,pointsout the special performance of ultrasonic micromotor,and proposes the great value of study-ing ultrasonic micromotor.Then,the authors apply the theory of roughness to modifying theExtended Reyleigh Wave theory,and obtain the accurate mathematical model of turning ve-locities in ultrasonic micromotor.Finally,the authors present its broad prospects in MEMS.更多还原