【摘要】 微机械传感器计算机辅助设计已成为微机械传感器研制中的必要手段。本文介绍了机械微传感器计算机辅助设计系统的结构和特点．并以一种特殊的硅微加速度传感器设计为例，论述了有关的技术问题。更多还原

【Abstract】 Abstract With the development of micro一mechanical sensor and the increasing-performance demands in percision and accuracy of this device,there is a criticalneed for CADtools which will permit rational design.Thise paper describes thearchitecture of CAD systemfOr micro一mechanical sensor.Some technical problemsare discoursed throgh a special microaccelerometer design with CAD system.更多还原