【摘要】 本文介绍的宽温度范围低频噪声谱测量及谱分析系统，可以准确测量７７～３００Ｋ范围内半导体器件的低频噪声谱（１Ｈｚ～１００ＫＨｚ）。其测量精度优于４％。温控精度达±０．２Ｋ。更多还原

【Abstract】 Abstract In this paper the measurement and analysis system of low frequencynoise spectrum range has been discussed, which can be used to measure the low frequencynoise of a semiconductor in the temperature range of 77～300K。Using the dual channelpreamplifiers series with cross spectrum estimator,the minimurn value of noise spectrum istwo tirnes less than a conventional noise spectrum measurement set up.Next, using thechange temperature liquid nitrogen dewar bottle and PID controller, the accuracy of temperature control is±0.2K。Finally,the quantitative analysis approach for separating three noisecomponents in low frequency noise spectrum(1/f noise,g r noise and white noise ) hasbeen obtained. This system is a useful tool for noise measurement of a low temperature andlow noise semiconductor,the investigation of noise mechanism and the analysis of defectsin devices(included surface defects and deep level impurities )更多还原