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弹道电子发射显微镜对Au/n-Si(100)界面势垒的探测
BALLISTIC ELECTRON EMISSION SPECTROSCOPY OF Au/Si(100) INTERFACE
【摘要】 用弹道电子发射显微镜对Au/n-Si(100)界面势垒测试,直接得出定点的势垒特性和纳米尺度的界面图象.通过所测的Ic-V曲线,可得所测点的肖特基势垒高度及电荷传输特性.界面图象可以显示界面极小范围内势垒的特性.
【Abstract】 The Au/n-Si(100) interface system has been studied by the ballistic electron emission microscopy (BEEM). The barrier heights at different positions of the interface and interface images have been directly obtained with nanometer-scale resolution. Schottky barrier heights and electronic transmission properties of the interface are deduced from Ic-V curves. The BEEM images reveal the properties of barrier in very small regions at the interface.
【基金】 国家自然科学基金和中国科学院“八五”重大项目资助的课题.
- 【文献出处】 物理学报 ,Acta Physica Sinica , 编辑部邮箱 ,1995年01期
- 【分类号】O475
- 【被引频次】1
- 【下载频次】79