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SnCl4结晶水对SnO2成膜的光电性质影响

The Effect of Tin Chloride Combined Water on the Optical and Electrical Properties of Tin Oxide Films

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【作者】 徐慢袁启华徐建梅赵宏声

【Author】 Xu Man;Yan Qihua;Xu Jianmei;Zhao Hongsheng ( Research Institute of Advanced Materials,WUT,Wuhan 430070,China.)

【机构】 武汉工业大学新材料研究所

【摘要】 报道了用无水SnCl4和SnCl4·5H2O为原料,用热喷涂法制备SnO2薄膜,在基片温度为530℃时,制得薄膜的X-射线,SEM图及其光电性质.总结出含H2O的SnCl4制得的薄膜生长速度快,电阻率低,两者在结构上无明显差异。

【Abstract】 Tin oxide films are prepared by spray pyrolysis using anhydrous and pentahydrate (SnCl4·5H2O) tin chloride as staring material. X-ray diffraction data,SEM and the optical and electrical properties of these films are reported. The growth rate of SnO2 films prepared from SnCl4·5H2O is observed to be higher and the resistivity is lower than for films prepared from anhydrous SnCl4 and they have no variation about their structure.

【关键词】 SnO2薄膜透明导电膜
【Key words】 tin oxide filmstransparent conduct films
【基金】 材料复合新技术国家实验室基金
  • 【分类号】TQ026.5
  • 【被引频次】5
  • 【下载频次】96
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