【摘要】 本文从实验的角度研究了具有场板和场限制环的P+N二极管的击穿特性，给出了场环至主结的最佳间距与衬底浓度和结深的关系曲线。并从物理机制上对此进行了较深入的讨论。更多还原

【Abstract】 In this paper,we studied the breakdown characterists of P+N diode with field ring and field plate experimentally and presented the curve revealing relationship among optimal spacing between field ring and main junction, substrate density and junction depths. In addition, we discussed its physical mechanism in depth.更多还原