【摘要】 本文阐述了浮栅ＥＥＰＲＯＭ存贮单元的工作原理及图形设计的方法考虑。比较和分析了四种不同的单元图形的利弊得失以及ＥＥＰＲＯＭ中低掺杂漏区（ＬＤＤ）结构的图形与工艺技术。更多还原

【Abstract】 The principle of memory cells in a FLOTOX-EEPROM is described in the paper. Techniques to design patterns of the memory cell are introduced. The advantages and disadvan-tages of four different cell patterns are compared and analyzed. The structure of low draln doping for EEPROM’s is also discussed as well as the technique for LDD.更多还原