【摘要】 应用光的干涉和衍射理论，系统地阐述了一种高灵敏度形状检测技术的基本原理，并提出了一个新的测试方法，可以消除坐标影响项，从而得到纯等高线条纹图。文中应用该技术，实际测量了带有几种压痕的平板表面的深度分布，分析了测量灵敏度和精度，给出了部分实验结果。更多还原

【Abstract】 The basic principle of a high sensitivity technique for shape measurement hasbeen described according to the theory of optical interferometry and diffraction. A newmethod is presented to eliminate the item containing coordinate variables in the formula,so that the pure contour fringe pattern can be obtained.The technique has been appliedto measure the depth distribution of a plate surface with extruded marks.Finally,thesensitivity and accuracy have been discussed,and some experimental results are provided.更多还原