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半导体激光器激活区中一维量子线的研制
The Fabrication of One-Dimension Quantum Wire Arrays in the Active Region of Semiconductor Laser
【摘要】 采用一维量子线阵列结构作为激活区的半导体激光器与采用二维量子阱结构激活区的常用激光器相比,具有许多优越的性能。利用能量为40KeV的Ga+离子注人到Al0.3Ga0.7As/GaAs二维量子阱,再经白光快速退火,制备了线宽500~40nm的一维量子线并研究其光电特性。
【Abstract】 Semiconductor laser with 1-dimension quantum well active region has been found to have superior characteristics compared to conventional 2-dimension quantum well active region laser. Tile Ga+ ions with the energy of 40 KeV have been implanted to Al0.3Ga0.7As/GaAs quantum well, followed by a rapid thermal annealing, to make the quantum wire with the wire width froyn 500 ̄40 nm,and tile optoelectronic properties have been studied.
- 【文献出处】 量子电子学 ,Chinese Journal of Quantum Electronics , 编辑部邮箱 ,1995年03期
- 【分类号】TN248.4
- 【下载频次】50